We have demonstrated that the thickness of the buffer layer is important for the crystallization, microstructure, and electrical properties of the subsequently deposited BTO thin film. We have also presented a method to control the orientations of the BTO films either by controlling the thickness of the buffer layers or by modifying the deposition procedure. A
buffer layer of 6 nm is found efficient to prevent secondary-phase formation and to allow high-temperature deposition. The problems associated with the formation of the intercrystal voids have been improved by controlling the process as well as buffer layer parameters. The BTO films deposited on the 7.2-nm-thick lanthanum nitrate buffer ICG-001 datasheet layer show a relative dielectric constant of 270, a remnant polarization (2P r) of 5 μC/cm2, and a coercive field (E c) of 100 kV/cm, which make it a suitable candidate for future electronic and photonic devices. Although the electrical properties are not as good as reported elsewhere, we believe this is the thinnest buffer layer reported up to now which results BMS-777607 nmr in preferentially oriented and well-crystallized BTO thin films. Acknowledgments This research was supported by the Interuniversity Attraction
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